Use this url to cite publication: https://hdl.handle.net/20.500.12259/50925
Development of TiHh2 using reactive sputtering technique
Type of publication
Straipsnis konferencijos medžiagoje kitoje duomenų bazėje / Article in conference proceedings in other databases (P1c)
Author(s)
| Author | Affiliation | |||
|---|---|---|---|---|
Klenauskis, Simas | ||||
Title
Development of TiHh2 using reactive sputtering technique
Is part of
Radiation interaction with material and its use in technologies 2010 : 3rd international conference, Kaunas, Lithuania, 20-23 September, 2010 : program and materials / Kaunas Universitety of Technology, Vytautas Magnus University, Lithuanian Energy Institute, Riga Technical Universitety. Kaunas : Technologija, 2010
Date Issued
| Date |
|---|
2010 |
Publisher
Kaunas : Technologija
Is Referenced by
Extent
p. 406-409
Abstract (en)
Crystalline structure and optical properties of titanium hydride films prepared by reactive magnetron sputtering were investigated with X-ray diffraction and optical spectrometer. In addition, their optical measurements were also carried out in visible infra-red regions. In investigation was found that thin films have fcc structure and ð - phase also established absorbed hydrogen amount in the thin films. Using spectrometer wre achieved reflection spectres.
Type of document
type::text::journal::journal article::research article
Language
Anglų / English (en)
Coverage Spatial
Lietuva / Lithuania (LT)
ISSN (of the container)
1822-508X
Other Identifier(s)
VDU02-000009593