Development of TiHh2 using reactive sputtering technique

Abstract

Crystalline structure and optical properties of titanium hydride films prepared by reactive magnetron sputtering were investigated with X-ray diffraction and optical spectrometer. In addition, their optical measurements were also carried out in visible infra-red regions. In investigation was found that thin films have fcc structure and ð - phase also established absorbed hydrogen amount in the thin films. Using spectrometer wre achieved reflection spectres